Analytical level set fabrication constraints for inverse design

A Level Set Method for Inverse Problems

Parametric Level Set Methods for Inverse Problems

In this paper, a parametric level set method for reconstruction of obstacles in general inverse problems is considered. General evolution equations for the reconstruction of unknown obstacles are derived in terms of the underlying level set parameters. We show that using the appropriate form of parameterizing the level set function results a significantly lower dimensional problem, which bypass...

Robust level-set-based inverse lithography.

Level-set based inverse lithography technology (ILT) treats photomask design for microlithography as an inverse mathematical problem, interpreted with a time-dependent model, and then solved as a partial differential equation with finite difference schemes. This paper focuses on developing level-set based ILT for partially coherent systems, and upon that an expectation-orient optimization frame...

A Survey on Level Set Methods for Inverse Problems and Optimal Design

The aim of this paper is to provide a survey on the recent development in level set methods in inverse problems and optimal design. We give introductions on the general features of such problems involving geometries and on the general framework of the level set method. In subsequent parts we discuss shape sensitivity analysis and its relation to level set methods, various approaches on construc...

Level-set, penalization and cartesian meshes: A paradigm for inverse problems and optimal design

The aim of this work is to combine penalization and level-set methods to solve inverse or shape optimization problems on uniform cartesian meshes. Penalization is a method to impose boundary conditions avoiding the use of body-fitted grids, whereas level-sets allow a natural non-parametric description of the geometries to be optimized. In this way, the optimization problem is set in a larger de...